Structural and Elastic Properties of Zirconium Nitride-Aluminum Nitride Multilayers

Kathryn A. Svinarich; G. L. Eesley; W. J. Meng

doi:10.1103/PhysRevB.42.4881

Structural and Elastic Properties of Zirconium Nitride-Aluminum Nitride Multilayers

Kathryn A. Svinarich, G. L. Eesley, W. J. Meng

Kettering University

Research output: Contribution to journal › Article › peer-review

Abstract

We have synthesized a series of zirconium nitride–aluminum nitride multilayers with a reactive sputtering technique. Structure and elastic response of these multilayers are characterized by x-ray-diffraction and transient piezoreflectance measurements. We observe a systematic decrease of the longitudinal elastic response in the direction of film growth as the composition modulation wavelength decreases. This contradicts a recent model of elastic response which predicts the absence of elastic anomaly in metal-insulator multilayers.

Original language	American English
Journal	Physical Review B
DOIs	https://doi.org/10.1103/PhysRevB.42.4881
State	Published - Sep 1 1990

Keywords

elastic properties of zirconium
nitride aluminum multilayers
reactive sputtering
elastic anomaly
metal-insulator multilayers

Disciplines

Condensed Matter Physics

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title = "Structural and Elastic Properties of Zirconium Nitride-Aluminum Nitride Multilayers",

abstract = "We have synthesized a series of zirconium nitride–aluminum nitride multilayers with a reactive sputtering technique. Structure and elastic response of these multilayers are characterized by x-ray-diffraction and transient piezoreflectance measurements. We observe a systematic decrease of the longitudinal elastic response in the direction of film growth as the composition modulation wavelength decreases. This contradicts a recent model of elastic response which predicts the absence of elastic anomaly in metal-insulator multilayers.",

keywords = "elastic properties of zirconium, nitride aluminum multilayers, reactive sputtering, elastic anomaly, metal-insulator multilayers",

author = "Svinarich, {Kathryn A.} and Eesley, {G. L.} and Meng, {W. J.}",

year = "1990",

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doi = "10.1103/PhysRevB.42.4881",

language = "American English",

journal = "Physical Review B",

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T1 - Structural and Elastic Properties of Zirconium Nitride-Aluminum Nitride Multilayers

AU - Svinarich, Kathryn A.

AU - Eesley, G. L.

AU - Meng, W. J.

PY - 1990/9/1

Y1 - 1990/9/1

N2 - We have synthesized a series of zirconium nitride–aluminum nitride multilayers with a reactive sputtering technique. Structure and elastic response of these multilayers are characterized by x-ray-diffraction and transient piezoreflectance measurements. We observe a systematic decrease of the longitudinal elastic response in the direction of film growth as the composition modulation wavelength decreases. This contradicts a recent model of elastic response which predicts the absence of elastic anomaly in metal-insulator multilayers.

AB - We have synthesized a series of zirconium nitride–aluminum nitride multilayers with a reactive sputtering technique. Structure and elastic response of these multilayers are characterized by x-ray-diffraction and transient piezoreflectance measurements. We observe a systematic decrease of the longitudinal elastic response in the direction of film growth as the composition modulation wavelength decreases. This contradicts a recent model of elastic response which predicts the absence of elastic anomaly in metal-insulator multilayers.

KW - elastic properties of zirconium

KW - nitride aluminum multilayers

KW - reactive sputtering

KW - elastic anomaly

KW - metal-insulator multilayers

UR - https://digitalcommons.kettering.edu/physics_facultypubs/1

U2 - 10.1103/PhysRevB.42.4881

DO - 10.1103/PhysRevB.42.4881

M3 - Article

JO - Physical Review B

JF - Physical Review B

ER -

Structural and Elastic Properties of Zirconium Nitride-Aluminum Nitride Multilayers

Abstract

Keywords

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