Original language | American English |
---|---|
Journal | Journal of Micromechanics and Microengineering |
State | Published - Sep 20 2017 |
Disciplines
- Electrical and Computer Engineering
- Electronic Devices and Semiconductor Manufacturing
- Nanotechnology Fabrication
Chinwe Tait, Lixin Dong
Research output: Contribution to journal › Article › peer-review
Original language | American English |
---|---|
Journal | Journal of Micromechanics and Microengineering |
State | Published - Sep 20 2017 |