@article{060167b5953540e9b7f5dbdf9a4cecfa,
title = "Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering",
keywords = "4H-SiC, Atomic Force Microscope (AFM), Chemomechanical Polish, Micro Raman, Photon Backscattering, TEM",
author = "W.C. Mitchel and J. Brown and D. Buckanan and R. Bertke and K. Malalingham and F. Orazio and P. Pirouz and Tseng, \{Huang-Ju R.\} and Uma Ramabadran and Bahram Roughani",
year = "2000",
month = may,
day = "10",
doi = "10.4028/www.scientific.net/MSF.338-342.841",
language = "American English",
volume = "Volumes 338-342",
journal = "Materials Science Forum",
}